AIXTRON AG has announced a new order for a Black Magic Plasma Enhanced CVD (PECVD) system from LED Linear high bay light, a start-up company based within the facilities of nano GUNE in San Sebastian city, in the Basque region of Spain. Graphenea’s focus is in developing graphene-based process technology for electronic devices.
Graphenea placed the order for a 4-inch wafer configuration deposition system during the third quarter of 2010. System delivery will be in the current month, followed by the installation and commissioning of the system by AIXTRON’s European support team.
Graphenea’s Scientific Director, Dr Amaia Zurutuza, comments: “At this stage in our research we need a dedicated CVD deposition system in order to test new graphene production recipes. We need equipment with scalable process technology and AIXTRON′s Black Magic was top of our list.
The Black Magic system is a turnkey solution for led high bay light deposition. High temperature operation, combined with excellent uniformity, are key characteristics for the purpose of our research. System flexibility, automatic recipe execution and process support were other compelling reasons for choosing AIXTRON.”
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